Automated High Precision Strain Measurement Using Nanobeam Diffraction Coupled with Precession

Single and Coupled Nanobeam Cavities

Strain Quantification Analysis of Epitaxial SiGe on SOI by Nanobeam Diffraction (NBD)

Strain engineering technology is now routinely integrated in the wafer fabrication process to increase the carrier mobility and improve the device performance. Measuring and controlling the strain in nanoscaled materials is a critical for developing the state-of-art semiconductor devices [1-2]. High-performance strain-engineered ETSOI devices have been reported, such as strained SOI (SSDOI) for...

Aberration-corrected precession electron diffraction

Precession electron diffraction (PED) is a promising technique for collecting high quality diffraction patterns for rapid nanoscale structural characterization [1]. It is able to reduce dynamical scattering effects, improving the interpretability of diffraction intensities over those obtained by conventional electron diffraction techniques. When used on a microscope that can produce a fine prob...

Strain mapping at the nanoscale using precession electron diffraction in transmission electron microscope with off axis camera

Dual-rail nanobeam microfiber-coupled resonator.

A microfiber-coupled dual-rail nanobeam resonator is proposed and demonstrated. The dual-rail scheme is employed to encourage the overlap between the light emitter and the air mode. The one-dimensional resonant cavity is formed by contacting a curved microfiber with the dual-rail nanobeam. The finite width of the dual-rail nanobeam turns out to be advantageous for both out-coupling with the mic...